Particle Size Analyzer

Process Monitoring Systems from Entegris are advanced automated systems for online particle size and/or particle count analysis of suspensions — providing real-time monitoring directly in the fluid stream. 

These systems are particularly designed to support high-purity fluid management environments, for example in semiconductor manufacturing (CMP slurry monitoring) or in industrial/chemical suspensions where particle contamination or distribution matters. 

They leverage the proven technology suite of the company’s particle-characterization products (e.g. SPOS-based analysis) to ensure precise, continuous monitoring.